放电离子化电流检测器

Abstract

提供了一种S/N比得到改善的使用低频介质阻挡放电的放电离子化电流检测器。在激发用高压电源(8)和放电电极(5)之间配置电流检测器(20),以检测由所产生的等离子引起的以脉冲形式流动的放电电流。将电流检测器(20)的检测信号和来自用于放大离子电流的电流放大器(18)的输出信号输入至输出提取单元(21)。输出提取单元(21)检测放电电流检测信号的陡峭上升部分并生成触发信号,然后在从该触发信号起的预定时间段内提取离子电流信号。这样能够消除在未发生等离子发光的时间段内出现在信号中的噪声的影响,由此提高检测信号的S/N比。
A discharge ionization current detector using a low-frequency dielectric barrier discharge with an improved S/N ratio is provided. A current detector 20 is disposed between an excitation high-voltage power source 8 and a discharge electrode 5 to detect a discharge current flowing in pulses due to plasma generation. The detection signal of the current detector 20 and an output signal from a current amplifier 18 for amplifying an ion current are inputted into an output extraction unit 21. The output extraction unit 21 detects a precipitous-rise portion of the discharge current detection signal and generates a trigger signal, and then extracts an ion current signal for a predetermined time period from the trigger signal. This can remove an influence of a noise appearing in a signal during a time period where no plasma emission is generated, thereby improving the S/N ratio of the detection signal.

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    CN-105074449-ANovember 18, 2015株式会社岛津制作所放电离子化电流检测器及其调整方法
    CN-105074449-BAugust 08, 2017株式会社岛津制作所放电离子化电流检测器及其调整方法
    CN-105359251-BDecember 14, 2016株式会社日立高新技术质量分析装置和质量分析装置的控制方法
    CN-105606695-AMay 25, 2016青岛佳明测控科技股份有限公司Dbd离子化检测器及其检测方法